Publication:
Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects
Date
| dc.contributor.author | Wilson, Chris | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Vereecke, Bart | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | O'Neill, A.G. | |
| dc.contributor.author | Horsfall, A.B. | |
| dc.contributor.imecauthor | Wilson, Chris | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Vereecke, Bart | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-18T05:18:00Z | |
| dc.date.available | 2021-10-18T05:18:00Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 1882-0778 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16544 | |
| dc.source.beginpage | 96503 | |
| dc.source.issue | 9 | |
| dc.source.journal | Applied Physics Express | |
| dc.source.volume | 2 | |
| dc.title | Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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