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The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms

Date

2008
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dc.contributor.authorVanhove, Nico
dc.contributor.authorLievens, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T12:20:16Z
dc.date.available2021-10-17T12:20:16Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14723
dc.source.conferenceFEBIP Workshop
dc.source.conferencedate7/07/2008
dc.source.conferencelocationThun Switzerland
dc.title

The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms

dc.typeMeeting abstract
dspace.entity.typePublication
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