Publication:
Nanosheet RMG: metal gate and interface dipole patterning
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2387 since deposited on 2021-10-29
4last month
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Acq. date: 2026-01-06
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Metrics
Views
2387 since deposited on 2021-10-29
4last month
2last week
Acq. date: 2026-01-06
Citations