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Conference contributions
Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
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Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Paul
;
Rotondaro, Antonio
;
Meuris, Marc
;
Schmidt, Harald
;
Heyns, Marc
;
Gräf, D.
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Acq. date: 2026-01-23
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Views
2087
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-23
Citations