Publication:

Time and temperature dependence of early stages of stress-induced-voiding in Cu/low-k interconnects

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1837 since deposited on 2021-10-17
5last month
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Acq. date: 2026-03-17

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1837 since deposited on 2021-10-17
5last month
1last week
Acq. date: 2026-03-17

Citations