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In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques
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1997 since deposited on 2021-10-15
Acq. date: 2025-10-23
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Views
1997 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations