Publication:
EUV scattering from CNT pellicles: measurement and control
| dc.contributor.author | Pollentier, Ivan | |
| dc.contributor.author | Luettgenau, Bernhard | |
| dc.contributor.author | Brose, Sascha | |
| dc.contributor.author | Timmermans, Marina | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Brems, Steven | |
| dc.contributor.author | Gallagher, Emily | |
| dc.contributor.imecauthor | Pollentier, Ivan | |
| dc.contributor.imecauthor | Timmermans, Marina | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Brems, Steven | |
| dc.contributor.imecauthor | Gallagher, Emily | |
| dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.contributor.orcidimec | Brems, Steven::0000-0002-0282-8528 | |
| dc.contributor.orcidimec | Timmermans, Marina::0000-0001-9805-8259 | |
| dc.contributor.orcidimec | Gallagher, Emily::0000-0002-2927-8298 | |
| dc.date.accessioned | 2022-03-11T13:20:23Z | |
| dc.date.available | 2022-03-11T13:20:23Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1117/12.2584718 | |
| dc.identifier.eisbn | 978-1-5106-4052-8 | |
| dc.identifier.isbn | 978-1-5106-4051-1 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39411 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 1160911 | |
| dc.source.conference | Conference on Extreme Ultraviolet (EUV) Lithography XII | |
| dc.source.conferencedate | FEB 22-26, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 11609 | |
| dc.title | EUV scattering from CNT pellicles: measurement and control | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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