Publication:
Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch
Date
| dc.contributor.author | Klaasse, Gerard | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-14T22:02:45Z | |
| dc.date.available | 2021-10-14T22:02:45Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6483 | |
| dc.source.beginpage | 631 | |
| dc.source.conference | Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens | |
| dc.source.conferencedate | 29/11/2002 | |
| dc.source.conferencelocation | Veldhoven The Netherlands | |
| dc.source.endpage | 634 | |
| dc.title | Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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