Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Channel and gate stack charge trapping investigation in vertical 3D NAND devices with poly-silicon channel
Publication:
Channel and gate stack charge trapping investigation in vertical 3D NAND devices with poly-silicon channel
Date
2017
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Subirats, Alexandre
;
Arreghini, Antonio
;
Breuil, Laurent
;
Degraeve, Robin
;
Van den Bosch, Geert
;
Linten, Dimitri
;
Furnemont, Arnaud
Journal
Abstract
Description
Metrics
Views
1962
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1962
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations