Publication:

Channel and gate stack charge trapping investigation in vertical 3D NAND devices with poly-silicon channel

Date

2017

Proceedings Paper

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Author(s)

Subirats, Alexandre

;

Arreghini, Antonio

;

Breuil, Laurent

;

Degraeve, Robin

;

Van den Bosch, Geert

;

Linten, Dimitri

;

Furnemont, Arnaud

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1967 since deposited on 2021-10-24

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Acq. date: 2026-05-18