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Influence of CH4/H2 reactive ion etching on the electrical and optical properties of AlGaAs/GaAs/InGaAs/GaAs heterostructures
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1976 since deposited on 2021-09-29
Acq. date: 2025-10-25
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1976 since deposited on 2021-09-29
Acq. date: 2025-10-25
Citations