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On the reliability of SIMS depth profiles through HfO2-stacks
Publication:
On the reliability of SIMS depth profiles through HfO2-stacks
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Bennett, J.
;
Huyghebaert, Cedric
;
Conard, Thierry
;
Gondran, C.
;
De Witte, Hilde
Journal
Applied Surface Science
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1955
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations
Metrics
Views
1955
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations