Publication:
Behavior of hot hole stressed SiO2/Si interface at elevated temperatures
Date
| dc.contributor.author | Zhang, Jenny | |
| dc.contributor.author | Al-Kofahi, I. S. | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.date.accessioned | 2021-10-01T09:52:21Z | |
| dc.date.available | 2021-10-01T09:52:21Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3169 | |
| dc.source.beginpage | 843 | |
| dc.source.endpage | 850 | |
| dc.source.issue | 2 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 83 | |
| dc.title | Behavior of hot hole stressed SiO2/Si interface at elevated temperatures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |