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Materials for advanced interconnects

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dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T00:44:35Z
dc.date.available2021-10-22T00:44:35Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23514
dc.source.beginpage1
dc.source.conferenceMoscow Workshop on Topical Issues of Nanoelectronics Technology
dc.source.conferencedate4/02/2014
dc.source.conferencelocationMoscow Russia
dc.source.endpage1
dc.title

Materials for advanced interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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