Publication:

Advanced CMOS manufacturing, a drive for plasma science and technology

Date

2012

Proceedings Paper

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Author(s)

de Marneffe, Jean-Francois

;

Altamirano Sanchez, Efrain

;

Milenin, Alexey

;

Samara, Vladimir

;

Boullart, Werner

;

Baklanov, Mikhaïl

Statistics

1944 since deposited on 2021-10-20

Acq. date: 2026-04-06