Publication:
3D Heterogeneous integration - High density FOWLP and lithography
Date
| dc.contributor.author | Miller, Andy | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.imecauthor | Miller, Andy | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.date.accessioned | 2021-10-25T23:29:31Z | |
| dc.date.available | 2021-10-25T23:29:31Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31346 | |
| dc.source.conference | SPIE Lithography | |
| dc.source.conferencedate | 27/02/2018 | |
| dc.source.conferencelocation | San Jose USA | |
| dc.title | 3D Heterogeneous integration - High density FOWLP and lithography | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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