Evaluation of piezoresistivity and 1/f noise of polycrystalline SiGe for MEMS sensor applications

dc.contributor.author	Gonzalez, Pilar
dc.contributor.author	Severi, Simone
dc.contributor.author	Lenci, Silvia
dc.contributor.author	Merken, Patrick
dc.contributor.author	Witvrouw, Ann
dc.contributor.author	De Meyer, Kristin
dc.contributor.imecauthor	Gonzalez, Pilar
dc.contributor.imecauthor	Severi, Simone
dc.contributor.imecauthor	Lenci, Silvia
dc.contributor.imecauthor	De Meyer, Kristin
dc.date.accessioned	2021-10-17T07:19:39Z
dc.date.available	2021-10-17T07:19:39Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13786
dc.source.beginpage	881
dc.source.conference	Eurosensors XXII
dc.source.conferencedate	7/09/2008
dc.source.conferencelocation	Dresden Germany
dc.source.endpage	884
dc.title	Evaluation of piezoresistivity and 1/f noise of polycrystalline SiGe for MEMS sensor applications
dc.type	Proceedings paper
dspace.entity.type	Publication
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