A reliability  study of titanium silicide lines using micro-raman spectroscopy and electron microscopy

dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Howard, Dave
dc.contributor.author	Rasras, Mahmoud
dc.contributor.author	Lauwers, A.
dc.contributor.author	Maex, Karen
dc.contributor.author	Groeseneken, Guido
dc.contributor.author	Maes, Herman
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.imecauthor	Maex, Karen
dc.contributor.imecauthor	Groeseneken, Guido
dc.date.accessioned	2021-09-30T08:08:11Z
dc.date.available	2021-09-30T08:08:11Z
dc.date.embargo	9999-12-31
dc.date.issued	1997
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1829
dc.source.beginpage	1591
dc.source.endpage	1594
dc.source.issue	10_11
dc.source.journal	Microelectronics and Reliability
dc.source.volume	37
dc.title	A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy
dc.type	Journal article
dspace.entity.type	Publication
Files	Original bundle Name: 1800.pdf Size: 363.41 KB Format: Adobe Portable Document Format Download
Publication available in collections:	Articles

Date