Publication:

DEMONSTRATING ELECTRICAL CONNECTION ON RECONSTITUTED ASIC CHIPS ON 8-INCH SILICON WAFER

 
dc.contributor.authorWei, Wei
dc.contributor.authorZhang, Lei
dc.contributor.authorTobback, Bert
dc.contributor.authorVisker, Jakob
dc.contributor.authorStakenborg, Tim
dc.contributor.authorKarve, Gauri
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorWei, Wei
dc.contributor.imecauthorZhang, Lei
dc.contributor.imecauthorTobback, Bert
dc.contributor.imecauthorVisker, Jakob
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorKarve, Gauri
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.orcidimecWei, Wei::0000-0002-1635-0924
dc.contributor.orcidimecZhang, Lei::0000-0002-7405-6352
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecKarve, Gauri::0009-0002-7316-5917
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.accessioned2024-08-29T08:15:13Z
dc.date.available2024-04-14T16:53:35Z
dc.date.available2024-08-29T08:15:13Z
dc.date.issued2024
dc.description.wosFundingTextThe authors gratefully acknowledge financial supports. This work is part of the Moore4Medical project funded by the ECSEL Joint Undertaking under the grant number H2020-EXCEL-2019-IA-876190. Authors also thank Geert Langenus, Geert Schoofs Glen Maes and Hans Dusar for their contributions to the fabrication process.
dc.identifier.doi10.1109/MEMS58180.2024.10439543
dc.identifier.eisbn979-8-3503-5792-9
dc.identifier.issn1084-6999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43827
dc.publisherIEEE
dc.source.beginpage1150
dc.source.conference37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.source.conferencedateJAN 21-25, 2024
dc.source.conferencelocationAustin
dc.source.endpage1153
dc.source.journalN/A
dc.source.numberofpages4
dc.title

DEMONSTRATING ELECTRICAL CONNECTION ON RECONSTITUTED ASIC CHIPS ON 8-INCH SILICON WAFER

dc.typeProceedings paper
dspace.entity.typePublication
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