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Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes
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1828 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-17
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1828 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-17
Citations