Publication:
Disruptive EUV Material Characterization in imec's AttoLab
Date
| dc.contributor.author | Dorney, Kevin | |
| dc.contributor.imecauthor | Dorney, Kevin | |
| dc.contributor.orcidimec | Dorney, Kevin::0000-0003-2097-6994 | |
| dc.date.accessioned | 2024-06-06T14:36:24Z | |
| dc.date.available | 2023-06-13T21:04:19Z | |
| dc.date.available | 2024-06-06T14:36:24Z | |
| dc.date.issued | 2023-06-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41732 | |
| dc.source.conference | EUV Litho Workshop and Supplier Showcase 2023 | |
| dc.source.conferencedate | 2023-06-03 | |
| dc.source.conferencelocation | imec, Leuven, BE | |
| dc.title | Disruptive EUV Material Characterization in imec's AttoLab | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |