Publication:
Experimental study of effect of pellicle on optical proximity fingerprint for 1.35 NA immersion ArF lithography
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1994 since deposited on 2021-10-18
2last month
Acq. date: 2025-12-11
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Metrics
Views
1994 since deposited on 2021-10-18
2last month
Acq. date: 2025-12-11
Citations