Publication:

Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHsu, Mark
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorMerckling, Clement
dc.contributor.authorMarinelli, Antonio
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned2021-10-23T11:21:27Z
dc.date.available2021-10-23T11:21:27Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26743
dc.source.beginpage65
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate17/11/2016
dc.source.conferencelocationGent Belgium
dc.source.endpage68
dc.title

Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
35312.pdf
Size:
261.13 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions