Publication:

Mechanical stress in and surrounding CoSi2 and TiSi2 lines

Date

1996
Proceedings Paper
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dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorHoward, Dave
dc.contributor.authorMaex, Karen
dc.contributor.authorMaes, Herman
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-29T14:23:43Z
dc.date.available2021-09-29T14:23:43Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1173
dc.source.beginpage609
dc.source.conferenceProceedings of the 26th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate9/09/1996
dc.source.conferencelocationBologna Italy
dc.source.endpage612
dc.title

Mechanical stress in and surrounding CoSi2 and TiSi2 lines

dc.typeProceedings paper
dspace.entity.typePublication
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