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The role of nitrogen in HfSiON defect passivation
Publication:
The role of nitrogen in HfSiON defect passivation
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
O'Connor, Robert
;
Aoulaiche, Marc
;
Pantisano, Luigi
;
Shickova, Adelina
;
Degraeve, Robin
;
Kaczer, Ben
;
Groeseneken, Guido
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1874
since deposited on 2021-10-18
Acq. date: 2026-07-18
Citations
Statistics
Views
1874
since deposited on 2021-10-18
Acq. date: 2026-07-18
Citations