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Reliability of ultra-thin dielectrics for giga scale silicon technologies

Date

1999
Proceedings Paper
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dc.contributor.authorMaes, Herman
dc.contributor.authorDegraeve, Robin
dc.contributor.authorNigam, Tanya
dc.contributor.authorDe Blauwe, Jan
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-14T11:29:54Z
dc.date.available2021-10-14T11:29:54Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3644
dc.source.beginpage7
dc.source.conference1998 Conference on Optoelectronic and Microelectronic Materials Devices; COMMAD 98.
dc.source.conferencelocation
dc.source.endpage14
dc.title

Reliability of ultra-thin dielectrics for giga scale silicon technologies

dc.typeProceedings paper
dspace.entity.typePublication
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