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Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM
Publication:
Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM
Date
2002
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Richard, Olivier
;
Maes, Jos
;
Roebben, G.
;
Bender, Hugo
;
De Gendt, Stefan
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Van Der Biest, O.
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2065
since deposited on 2021-10-15
1
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Acq. date: 2025-12-08
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Metrics
Views
2065
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-08
Citations