Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments

dc.contributor.author	Janssens, Stoffel
dc.contributor.author	Drijkoningen, Sien
dc.contributor.author	Haenen, Ken
dc.contributor.imecauthor	Haenen, Ken
dc.contributor.orcidimec	Haenen, Ken::0000-0001-6711-7367
dc.date.accessioned	2021-10-22T02:18:50Z
dc.date.available	2021-10-22T02:18:50Z
dc.date.embargo	9999-12-31
dc.date.issued	2014
dc.identifier.issn	0003-6951
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24002
dc.identifier.url	http://scitation.aip.org/content/aip/journal/apl/104/7/10.1063/1.4866028
dc.source.beginpage	-73107
dc.source.issue	7
dc.source.journal	Applied Physics Letters
dc.source.volume	104
dc.title	Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments
dc.type	Journal article
dspace.entity.type	Publication
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