Publication:
Some fundamental aspects of profile etching at InP surfaces
Date
| dc.contributor.author | Vermeir, I. E. | |
| dc.contributor.author | Gomes, W. P. | |
| dc.contributor.author | Van Daele, P. | |
| dc.date.accessioned | 2021-09-29T13:24:29Z | |
| dc.date.available | 2021-09-29T13:24:29Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/996 | |
| dc.source.beginpage | 3226 | |
| dc.source.endpage | 3232 | |
| dc.source.journal | J. Electrochem. Soc. | |
| dc.source.volume | 142 | |
| dc.title | Some fundamental aspects of profile etching at InP surfaces | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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