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Insight in bonding configuration of O atoms on Si(100) surface for epitaxial Si-O superlattices

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dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorDelabie, Annelies
dc.contributor.authorDouhard, Bastien
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBender, Hugo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-22T02:19:43Z
dc.date.available2021-10-22T02:19:43Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24005
dc.source.conferenceChemCYS
dc.source.conferencedate27/02/2014
dc.source.conferencelocationBlankenberge Belgium
dc.title

Insight in bonding configuration of O atoms on Si(100) surface for epitaxial Si-O superlattices

dc.typeMeeting abstract
dspace.entity.typePublication
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