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Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysis

Date

2016
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dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorMartens, Koen
dc.contributor.authorSimoen, Eddy
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-23T11:33:03Z
dc.date.available2021-10-23T11:33:03Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26783
dc.identifier.urlhttps://mrsspring.zerista.com/event/member/243732
dc.source.beginpageEP4.8.02
dc.source.conferenceMRS Spring Meeting Symposium EP4: Emerging Silicon Science and Technology
dc.source.conferencedate28/03/2016
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysis

dc.typeMeeting abstract
dspace.entity.typePublication
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