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CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities
Publication:
CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities
Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hermans, Artur
;
Van Daele, Michiel
;
Kieninger, Clemens
;
Dendooven, Jolien
;
Clemmen, Stephane
;
Detavernier, Christophe
;
Koos, Christian
;
Baets, Roel
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Metrics
Views
1897
since deposited on 2021-10-24
413
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations