Publication:
Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.
Date
| dc.contributor.author | Pacco, Antoine | |
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Akanishi, Yuya | |
| dc.contributor.author | Altamirano Sanchez, Efrain | |
| dc.contributor.imecauthor | Pacco, Antoine | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Akanishi, Yuya | |
| dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.date.accessioned | 2021-10-29T01:45:48Z | |
| dc.date.available | 2021-10-29T01:45:48Z | |
| dc.date.issued | 2020 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35695 | |
| dc.identifier.url | https://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf | |
| dc.source.beginpage | S8.3 | |
| dc.source.conference | 29th Materials for Advanced Metallization (MAM) Conference | |
| dc.source.conferencedate | 22/03/2020 | |
| dc.source.conferencelocation | Online Online | |
| dc.title | Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication. | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |