Publication:

A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator

Date

2013
Journal article
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dc.contributor.authorRudra, Sukumar
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned2021-10-21T11:36:33Z
dc.date.available2021-10-21T11:36:33Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23023
dc.source.beginpage8
dc.source.endpage12
dc.source.journalMicroelectronic Engineering
dc.source.volume105
dc.title

A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator

dc.typeJournal article
dspace.entity.typePublication
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