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Electromigration behavior of 2μm sub-micron Cu/SiCN hybrid bonds
Publication:
Electromigration behavior of 2μm sub-micron Cu/SiCN hybrid bonds
Date
2019
Proceedings Paper
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609.39 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Messemaeker, Joke
;
Kim, Soon-Wook
;
Stucchi, Michele
;
Beyer, Gerald
;
Beyne, Eric
;
Croes, Kristof
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Abstract
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3
since deposited on 2021-10-27
Acq. date: 2025-10-27
Views
1999
since deposited on 2021-10-27
Acq. date: 2025-10-27
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Downloads
3
since deposited on 2021-10-27
Acq. date: 2025-10-27
Views
1999
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations