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Fabrication and characterization of epitaxial Si-O superlattices

Date

2014
Meeting abstract
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dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLin, Dennis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorRichard, Olivier
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorMoussa, Alain
dc.contributor.authorBender, Hugo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-22T02:20:07Z
dc.date.available2021-10-22T02:20:07Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24006
dc.identifier.urlhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=276&day=2014-09-15&year=2014&Itemid=&id_season=12
dc.source.beginpageJ26
dc.source.conferenceE-MRS Fall Symposium J: Alternative Semiconductor Integration in Si Microelectronics
dc.source.conferencedate15/09/2014
dc.source.conferencelocationWarsaw Poland
dc.title

Fabrication and characterization of epitaxial Si-O superlattices

dc.typeMeeting abstract
dspace.entity.typePublication
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