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Improvement of the focus-exposure latitude using optimised illumination and mask design
Publication:
Improvement of the focus-exposure latitude using optimised illumination and mask design
Date
1994
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pforr, Rainer
;
Ronse, Kurt
;
Jaenen, Patrick
;
Jonckheere, Rik
;
Van den hove, Luc
;
van Oorschot, P.
;
Luehrman, P.
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Abstract
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2013
since deposited on 2021-09-29
422
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
2013
since deposited on 2021-09-29
422
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations