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VLSI compatible SiON finFET sensors for biosensing applications: 2D/3D TCAD simulations and experimental verification of pH dependency

Date

2019
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dc.contributor.authorSantermans, Sybren
dc.contributor.authorMartens, Koen
dc.contributor.authorHellings, Geert
dc.contributor.authorRuic, Dino
dc.contributor.authorGupta, Mihir
dc.contributor.authorVan Roy, Wim
dc.contributor.authorDu Bois, Bert
dc.contributor.authorSeveri, Simone
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorSantermans, Sybren
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRuic, Dino
dc.contributor.imecauthorGupta, Mihir
dc.contributor.imecauthorVan Roy, Wim
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecSantermans, Sybren::0000-0002-0843-102X
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecGupta, Mihir::0000-0003-0286-7997
dc.contributor.orcidimecVan Roy, Wim::0000-0003-3232-1987
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.date.accessioned2021-10-27T17:34:30Z
dc.date.available2021-10-27T17:34:30Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33937
dc.source.conferenceIEEE Semiconductor Interface Specialists Conference (SISC)
dc.source.conferencedate11/12/2019
dc.source.conferencelocationSan Diego, CA USA
dc.title

VLSI compatible SiON finFET sensors for biosensing applications: 2D/3D TCAD simulations and experimental verification of pH dependency

dc.typeMeeting abstract
dspace.entity.typePublication
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