Publication:

Wetting challenges in cleaning of high aspect ratio nano-structures

Date

2012
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Xu, XiuMei  
;
Vereecke, Guy  
;
Van den Hoogen, Erik
;
Smeers, Jens
;
Armini, Silvia  
;
Delande, Tinne  
;
Struyf, Herbert  

Journal

Abstract

Description

Metrics

Views

1884 since deposited on 2021-10-20
Acq. date: 2025-12-15

Citations

Metrics

Views

1884 since deposited on 2021-10-20
Acq. date: 2025-12-15

Citations