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An analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devices

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dc.contributor.authorTrevisoli, R.D.
dc.contributor.authorMartino, J.A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorPavanello, M.A.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-20T17:08:29Z
dc.date.available2021-10-20T17:08:29Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21634
dc.source.beginpage519
dc.source.endpage524
dc.source.issue3
dc.source.journalMicroelectronics Reliability
dc.source.volume52
dc.title

An analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devices

dc.typeJournal article
dspace.entity.typePublication
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