Publication:
Broadband metal-insulator-metal capacitors on silicon interposer for low impedance power distribution network
Date
| dc.contributor.author | Ueda, Nao | |
| dc.contributor.author | Roda Neve, Cesar | |
| dc.contributor.author | Detalle, Mikael | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.author | Van der Plas, Geert | |
| dc.contributor.author | Nagata, Makoto | |
| dc.contributor.imecauthor | Detalle, Mikael | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.imecauthor | Van der Plas, Geert | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
| dc.date.accessioned | 2021-10-22T23:46:46Z | |
| dc.date.available | 2021-10-22T23:46:46Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26022 | |
| dc.source.conference | DATE Workshop: 3D Integration Technology, Architecture, Design, Package, Automation, and Test | |
| dc.source.conferencedate | 13/03/2015 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Broadband metal-insulator-metal capacitors on silicon interposer for low impedance power distribution network | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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