Publication:
A silicon micromachined magnetic actuator using a two layer electroplating process
Date
| dc.contributor.author | De Bruyker, Dirk | |
| dc.contributor.author | Chévrier, Jean-Baptiste | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Lowe, H. | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.date.accessioned | 2021-09-29T14:21:57Z | |
| dc.date.available | 2021-09-29T14:21:57Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1155 | |
| dc.source.beginpage | 88 | |
| dc.source.conference | Actuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 91 | |
| dc.title | A silicon micromachined magnetic actuator using a two layer electroplating process | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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