Publication:

Stabilization of amorphous structures in ALCVD high-k oxide layers

Date

2001

Presentation

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Author(s)

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Richard, Olivier

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Carter, Richard

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De Gendt, Stefan

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Van der Biest, O.

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Tuominen, Marko

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Metrics

2044 since deposited on 2021-10-14

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Acq. date: 2026-01-05