Publication:

Trends in scaling the Cu metallization

Date

2017
Meeting abstract
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dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorWilson, Chris
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-24T15:55:57Z
dc.date.available2021-10-24T15:55:57Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29664
dc.source.conferenceMaterials for Advanced Metallization Conference
dc.source.conferencedate26/03/2017
dc.source.conferencelocationDresden Germany
dc.title

Trends in scaling the Cu metallization

dc.typeMeeting abstract
dspace.entity.typePublication
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