Publication:

Experimental validation of rigorous, 3D profile models for negative-tone develop resists

Date

2014

Proceedings Paper

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Files

27859.pdf 959.57 KB

Author(s)

;

Klostermann, Ulrich

;

Kamohara, Itaru

;

Schmoeller, Thomas

;

;

Demmerle, Wolfgang

;

De Bisschop, Peter

;

Mailfert, Julien

Statistics

1943 since deposited on 2021-10-22

Acq. date: 2026-02-27