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Improving mechanical robustness of ultra-low-k SiOCH PECVD materials

Date

2010
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dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorShamiryan, Denis
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T22:35:06Z
dc.date.available2021-10-18T22:35:06Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18117
dc.identifier.urlhttp://www.malab.com/stress_workshop_2010/
dc.source.conference11th International Workshop on Stress-Induced Phenomena in Metallization
dc.source.conferencedate12/04/2010
dc.source.conferencelocationDresden Germany
dc.title

Improving mechanical robustness of ultra-low-k SiOCH PECVD materials

dc.typeOral presentation
dspace.entity.typePublication
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