Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor deposition

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Author(s)

Gencarelli, Federica

;

Shimura, Yosuke

;

;

Vincent, Benjamin

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;

Vanhaeren, Danielle

;

Richard, Olivier

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;

Vandervorst, Wilfried

;

;

;

Journal

Thin Solid Films

Metrics

1976 since deposited on 2021-10-22

Acq. date: 2025-12-08