Publication:

Study of the surface reactions in ALD hafnium aluminates

Date

2010
Journal article
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dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVinckier, Chris
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T19:44:05Z
dc.date.available2021-10-18T19:44:05Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17718
dc.source.beginpageG7
dc.source.endpageG12
dc.source.issue1
dc.source.journalJournal of the Electrochemical Society
dc.source.volume157
dc.title

Study of the surface reactions in ALD hafnium aluminates

dc.typeJournal article
dspace.entity.typePublication
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