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Characterization of inorganic dielectric layers for low thermal budget wafer to wafer bonding
Publication:
Characterization of inorganic dielectric layers for low thermal budget wafer to wafer bonding
Date
2017
Proceedings Paper
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35559.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Peng, Lan
;
Phommahaxay, Alain
;
Kim, Soon-Wook
;
De Vos, Joeri
;
Sleeckx, Erik
;
Miller, Andy
;
Beyer, Gerald
;
Beyne, Eric
Journal
Abstract
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1989
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations
Metrics
Views
1989
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations