Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Characterization of inorganic dielectric layers for low thermal budget wafer to wafer bonding
Publication:
Characterization of inorganic dielectric layers for low thermal budget wafer to wafer bonding
Copy permalink
Date
2017
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
35559.pdf
784.24 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Peng, Lan
;
Phommahaxay, Alain
;
Kim, Soon-Wook
;
De Vos, Joeri
;
Sleeckx, Erik
;
Miller, Andy
;
Beyer, Gerald
;
Beyne, Eric
Journal
Abstract
Description
Metrics
Views
1992
since deposited on 2021-10-24
Acq. date: 2025-12-14
Citations
Metrics
Views
1992
since deposited on 2021-10-24
Acq. date: 2025-12-14
Citations