Publication:

Investigation of physical cleaning process window by atomic force microscope

Date

2009-10
Meeting abstract
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dc.contributor.authorKim, Tae-Gon
dc.contributor.authorWostyn, Kurt
dc.contributor.authorBearda, Twan
dc.contributor.authorPark, Jin-Goo
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-17T23:27:28Z
dc.date.available2021-10-17T23:27:28Z
dc.date.embargo9999-12-31
dc.date.issued2009-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15598
dc.source.beginpage2079
dc.source.conference216th ECS Meeting
dc.source.conferencedate5/10/2009
dc.source.conferencelocationVienna Austria
dc.title

Investigation of physical cleaning process window by atomic force microscope

dc.typeMeeting abstract
dspace.entity.typePublication
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