Publication:
Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Date
| dc.contributor.author | Boher, P. | |
| dc.contributor.author | Defranoux, C. | |
| dc.contributor.author | Heinrich, P. | |
| dc.contributor.author | Wolstenholme, J. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-15T04:02:57Z | |
| dc.date.available | 2021-10-15T04:02:57Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7238 | |
| dc.source.conference | E-MRS Spring Meeting Symposium I: Functional Metal Oxides - Semiconductor Structures | |
| dc.source.conferencedate | 10/06/2003 | |
| dc.source.conferencelocation | Stassbourg France | |
| dc.title | Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k dielectrics | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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